Electron spin resonance evidence for the structure of a switching oxide trap: Long term structural change at silicon dangling bond sites in SiO2

نویسندگان

  • John F. Conley
  • Patrick M. Lenahan
  • Aivars J. Lelis
  • Timothy R. Oldham
چکیده

We provide direct and unambiguous experimental spectroscopic evidence for the structure of a switching oxide trap in thermally grown SiO2 gate oxides on Si. Switching oxide traps can ‘‘switch’’ charge state in response to changes in the voltage applied to the gate of a metal-oxide-semiconductor field-effect transistor. Electron spin resonance measurements reveal that some Eg8 centers ~a hole trapped at an oxygen vacancy! can behave as switching oxide traps. © 1995 American Institute of Physics.

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تاریخ انتشار 1996